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This book will help chemists and non-chemists alike understand the fundamentals of surface chemistry and precursor design, and how these precursors drive the processes of atomic layer deposition, and how the surface-precursor interaction governs atomic layer deposition processes. The underlying principles in atomic layer deposition rely on the chemistry of a precursor with a surface.
- Format: Pocket/Paperback
- ISBN: 9783110712513
- Språk: Engelska
- Antal sidor: 113
- Utgivningsdatum: 2021-11-22
- Förlag: De Gruyter