CMOS Hotplate Chemical Microsensors 1
bokomslag CMOS Hotplate Chemical Microsensors
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CMOS Hotplate Chemical Microsensors

Markus Graf • Diego Barrettino • Henry P Baltes • Andreas Hierlemann

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1559:-

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  • 125 sidor
  • 2007
The first comprehensive text on microhotplate-based chemical sensor systems in CMOS-technology covers all aspects of successful sensor prototyping: theoretical considerations for modelling, controller- and system design, simulation of circuits and microsensors, design considerations, microfabrication, packaging and testing. A whole family of metal-oxide based microsensor systems with increasing complexity is presented, including fully integrated sensor arrays. This represents one of the first examples of integrated nanomaterials, microtechnology and embedded circuitry.
  • Författare: Markus Graf, Diego Barrettino, Henry P Baltes, Andreas Hierlemann
  • Illustratör: 5 colour 105 illustrations
  • Format: Inbunden
  • ISBN: 9783540695615
  • Språk: Engelska
  • Antal sidor: 125
  • Utgivningsdatum: 2007-04-01
  • Förlag: Springer-Verlag Berlin and Heidelberg GmbH & Co. K

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