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This book discusses method to produce compact microwave plasma by overcoming challenges posed bygeometrical cutoff of waveguide and density cutoff of plasma alongwith the properties of such compact plasmas. It also brings out a new area of applications where such compact high densities plasmas are utilized for multi-element focused ion beams.
- Format: Pocket/Paperback
- ISBN: 9781138033672
- Språk: Engelska
- Antal sidor: 392
- Utgivningsdatum: 2017-10-18
- Förlag: Taylor & Francis Ltd