Defect Recognition and Image Processing in Semiconductors

The sixth in an international series of meetings, brings together researchers studying defect inhomogeneities in semiconductor materials and devices. Defect inhomogeneities affect the performance of both as grown and processed semiconductors. This volume aims to provide the researcher with an overview of recent mapping and microscopy techniques available for the study of such defects and will help understanding of the effect of such defects on device performance. Topics covered include: optical, electrical and acoustical substrate defect imaging techniques, as applied to semiconductor substrates, epilayers, nanostructures and devices; techniques for processing quantities of data coming automated defect testing methods; and correlation of device performance with defect density and distribution.