bokomslag Enabling Technology for MEMS and Nanodevices
Vetenskap & teknik

Enabling Technology for MEMS and Nanodevices

Henry Baltes Oliver Brand Gary K Fedder Christofer Hierold Jan G Korvink

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Andra format:

  • 439 sidor
  • 2013
This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. A close look at enabling technologies is taken, the first section on MEMS featuring an introduction to the challenges and benefi ts of three-dimensional silicon processing. An insider's view of industrial MEMS commercialization is followed by chapters on capacitive interfaces for MEMS, packaging issues of micro- and nanosystems, MEMS contributions to high frequency integrated resonators and filters, and the uses of MEMS in mass data storage and electrochemical imaging by means of scanning micro- and nanoprobes. The second section on nanodevices first tackles the emerging topic of nanofluidics with a contribution each on simulation tools and on devices and uses, followed by another two on nanosensors featuring CNT sensors and CMOS-based DNA sensor arrays, respectively.
  • Författare: Henry Baltes, Oliver Brand, Gary K Fedder, Christofer Hierold, Jan G Korvink
  • Illustratör: 15 schwarz-weiße Tabellen 245 schwarz-weiße Abbildungen
  • Format: Pocket/Paperback
  • ISBN: 9783527334988
  • Språk: Engelska
  • Antal sidor: 439
  • Utgivningsdatum: 2013-04-17
  • Förlag: Wiley-VCH Verlag GmbH