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A graduate-level description of recent Japanese research on the chemistry of amorphous silicon film deposition associated with plasma CVD, a step in producing amorphous semiconductors. Reports on studies (of microscopic processes of gas-phase reaction as well as chemical reactions on the film growin
- Format: Inbunden
- ISBN: 9780792303091
- Språk: Engelska
- Antal sidor: 277
- Utgivningsdatum: 1989-11-01
- Förlag: Springer