Handbook of Silicon Based MEMS Materials and Technologies 1

Vetenskap & teknik

Handbook of Silicon Based MEMS Materials and Technologies

Markku Tilli • Mervi Paulasto-Kröckel • Matthias Petzold • Horst Theuss • Teruaki Motooka

Pocket

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1026 sidor
2020

Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, modeling, manufacturing, processing, system integration, measurement, and materials characterization techniques of MEMS structures. The third edition of this book provides an important up-to-date overview of the current and emerging technologies in MEMS making it a key reference for MEMS professionals, engineers, and researchers alike, and at the same time an essential education material for undergraduate and graduate students.

Författare: Markku Tilli, Mervi Paulasto-Kröckel, Matthias Petzold, Horst Theuss, Teruaki Motooka
Format: Pocket/Paperback
ISBN: 9780128177860
Språk: Engelska
Antal sidor: 1026
Utgivningsdatum: 2020-04-17
Förlag: Elsevier Science Publishing Co Inc