Handbook of Thin Film Deposition

Handbook of Thin Film Deposition: Theory, Technology and Semiconductor Applications, Fifth Edition, is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film microproperties, ferroelectric films, LED research, and materials for memory applications, and other thin film applications.


Of particular note in this new edition is the coverage of “reduction to practice,” a phase where the idea for a technology transitions from a concept to actual implementation. This section includes chapters that review the most relevant methods to fabricate thin films toward practical applications. This book also discusses the latest applications of various thin film deposition technologies.


Handbook of Thin Film Deposition: Theory, Technology and Semiconductor Applications, Fifth Edition, is suitable for students, materials scientists, engineers, and managers working in academia or semiconductor-related R&D.

• Offers a practical survey of thin film technologies including design, fabrication, and reliability
• Covers core processes and applications in the semiconductor industry and discusses latest advances in new thin film development
• Features new chapters that review methods on front-end and back-end thin films