III-V Integrated Circuit Fabrication Technology

GaAs processing has reached a mature stage. New semiconductor compounds are emerging that will dominate future materials and device research, although the processing techniques used for GaAs will still remain relevant. This book covers all aspects of the current state of the art of IIIV processing, with emphasis on HBTs. It is aimed at practicing engineers and graduate students and engineers new to the field of IIIV semiconductor IC processing. The books primary purpose is to discuss all aspects of processing of active and passive devices, from crystal growth to backside processing, including lithography, etching, and film deposition.