Introduction to Optical Metrology

This book describes both theory and practice of optical techniques to measure various parameters encountered routinely in science and engineering. Introduction to Optical Metrology, Second Edition examines the theory and practice of various measurement methodologies utilizing both the corpuscular and the wave nature of light. The book begins by introducing the subject of optics and then addresses the propagation of laser beams through free space and optical systems. It discusses interferometry, holography, speckle metrology, moir phenomenon, photoelasticity, and microscopy. Remaining chapters describe techniques and methods of measurements of refractive index, thickness, radii of curvature, angle, velocity, pressure, length, optical testing, and fiber-optic based methods. Apart from these, this edition includes a chapter on temperature measurement, sections on fringe unwrapping methods, testing of freeform optics, shearography etc. Featuring new and updated exercise problems at the end of each chapter, this edition provides an applied understanding of essential optical measurement concepts, techniques, and procedures. The primary audience for this book is undergraduate and graduate students who specialize in optics. It will also be useful to researchers and professionals working on optical testing and fiber optic- and MEMS-based measurements. A solutions manual and figure slides are available for adopting professors.