Issledovanie plenok AlN i sozdanie priborov na ikh osnove

Progress sovremennykh sredstv svyazi i radiolokatsii, vo mnogom zaklyuchayushchiysya v povyshenii rabochikh chastot ispol'zuemykh ustroystv, diktuet neobkhodimost' ispol'zovaniya novykh materialov, sposobnykh obespechit' rabotu v SVCh-diapazone. Ryad isklyuchitel'nykh svoystv delayut nitrid alyuminiya krayne perspektivnym materialom dlya samykh raznykh oblastey primeneniya, v chastnosti, dlya sozdaniya akustoelektronnykh ustroystv. Tselyami dannoy raboty byli issledovanie protsessov polucheniya plenok nitrida alyuminiya s pomoshch'yu vysokochastotnogo magnetronnogo raspyleniya, a takzhe vozmozhnosti ikh primeneniya dlya sozdaniya akustoelektronnykh priborov, rabotayushchikh v SVCh i KVCh diapazonakh.