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Laser-Assisted Microtechnology

Simeon M Metev • Vadim P Veiko • R M Osgood

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270 sidor
2012

Laser-Assisted Microtechnology introduces the principles and techniques of laser-assisted microtechnology with emphasis on micromachining of thin films, microprocessing of materials, maskless laser micropatterning and laser-assisted synthesis of thin-film systems. The experimental and theoretical physico-chemical basis of every technological process is presented in detail. On the basis of some characteristic examples of applications, the capabilities of the technological methods as well as the optimum conditions for their realization are discussed. In this second edition, besides the actualization of the literature, a new chapter concerning the laser-assisted wet chemical micro etching, has been added. This is a new method for direct 3D-micro structuring of solids, with a number of potential applications.

Författare: Simeon M Metev, Vadim P Veiko, R M Osgood
Format: Pocket/Paperback
ISBN: 9783642872730
Språk: Engelska
Antal sidor: 270
Utgivningsdatum: 2012-07-07
Förlag: Springer-Verlag Berlin and Heidelberg GmbH & Co. K