1279:-
Uppskattad leveranstid 7-12 arbetsdagar
Fri frakt för medlemmar vid köp för minst 249:-
Andra format:
- Inbunden 1789:-
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
- Format: Pocket/Paperback
- ISBN: 9783662508268
- Språk: Engelska
- Antal sidor: 519
- Utgivningsdatum: 2016-10-06
- Förlag: Springer-Verlag Berlin and Heidelberg GmbH & Co. K