Vetenskap & teknik
Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology
Saburo Nonogaki • Ueno Takumi • Toshio Ito
Inbunden
4819:-
Uppskattad leveranstid 7-12 arbetsdagar
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"Explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing. Considers future trends in lithography and resist material technology. Reviews the interaction of light, electron beams, and X-rays with resist materials."
- Format: Inbunden
- ISBN: 9780824799519
- Språk: Engelska
- Antal sidor: 336
- Utgivningsdatum: 1998-06-01
- Förlag: CRC Press Inc