Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology 1
bokomslag Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology
Vetenskap & teknik

Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology

Saburo Nonogaki • Ueno Takumi • Toshio Ito

Inbunden

4839:-

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  • 336 sidor
  • 1998
"Explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing. Considers future trends in lithography and resist material technology. Reviews the interaction of light, electron beams, and X-rays with resist materials."
  • Författare: Saburo Nonogaki, Ueno Takumi, Toshio Ito
  • Format: Inbunden
  • ISBN: 9780824799519
  • Språk: Engelska
  • Antal sidor: 336
  • Utgivningsdatum: 1998-06-01
  • Förlag: CRC Press Inc

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