Microscale Fluid-Thermal Phenomena Based On The Boltzmann-ESBGK Model

The research work in this PhD dissertation is focused on numerical investigations of micro-scale fluid-thermal phenomena. A comprehensive deterministic Boltzmann-ESBGK model has been developed and applied to several micro-scale problems. It helps to better understand the physics in an effcient and economic way comparing to experiments. It also shows great potentials in uncertainty quantification study of MEMS reliability.