Vetenskap & teknik
Physical Design and Mask Synthesis for Directed Self-Assembly Lithography
Seongbo Shim • Youngsoo Shin
Inbunden
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This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification. Directed self-assembly lithography (DSAL) is a highly promising patterning solution in sub-7nm technology.
- Illustratör: Bibliographie 50 schwarz-weiße und 40 farbige Abbildungen
- Format: Inbunden
- ISBN: 9783319762937
- Språk: Engelska
- Antal sidor: 138
- Utgivningsdatum: 2018-04-03
- Förlag: Springer International Publishing AG