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A compendium of otherwise scattered information on the physics involved in the construction and operation of semiconductor devices at the submicron level. Addressed to people who make such devices, and assumes a solid understanding of solid state physics and electronics, and at least a familiarity w
- Format: Inbunden
- ISBN: 9780306438431
- Språk: Engelska
- Antal sidor: 396
- Utgivningsdatum: 1991-12-01
- Förlag: Kluwer Academic / Plenum Publishers