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This book focuses on homoepitaxy with the necessary systems, techniques, and models for growth and dopant incorporation. It discusses the obstacles any new technology must overcome to be commercially successful with specific references to the challenges confronting Silicon-Molecular Beam Epitaxy.
- Format: Inbunden
- ISBN: 9781315897523
- Språk: Engelska
- Antal sidor: 306
- Utgivningsdatum: 2017-12-14
- Förlag: CRC Press