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Strain Effect in Semiconductors
Yongke Sun • Scott E Thompson • Toshikazu Nishida
Inbunden
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Strain Effect in Semiconductors: Theory and Device Applications presents the fundamentals and applications of strain in semiconductors and semiconductor devices that is relevant for strain-enhanced advanced CMOS technology and strain-based piezoresistive MEMS transducers. Discusses relevant applications of strain while also focusing on the fundamental physics pertaining to bulk, planar, and scaled nano-devices. Hence, this book is relevant for current strained Si logic technology as well as for understanding the physics and scaling for future strained nano-scale devices.
- Format: Inbunden
- ISBN: 9781441905512
- Språk: Engelska
- Antal sidor: 350
- Utgivningsdatum: 2009-12-04
- Förlag: Springer-Verlag New York Inc.