Thin Film Resistive Sensors

Thin film resistive sensors represent a new category of solid state sensors. They have applications in such diverse areas as laboratory measurement, industry and air pollution control. Their chief characteristic is that, by modifying their resistance, they convert radiant, mechanical, thermal, magnetic or chemical energy into an electrical signal. This review discusses in detail each of the five types of input energy involved. Descriptions are given of the materials, properties, structure and principles of operation of these sensors as well as their main applications. Results of the authors' research and reviews of the current literature are also included.