bokomslag Introduction to Microlithography
Konst & kultur

Introduction to Microlithography

Larry F Thompson

Inbunden

3299:-

Funktionen begränsas av dina webbläsarinställningar (t.ex. privat läge).

Uppskattad leveranstid 1-3 arbetsdagar

Fri frakt för medlemmar vid köp för minst 249:-

  • 540 sidor
  • 1994
Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove
invaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography.
  • Författare: Larry F Thompson
  • Format: Inbunden
  • ISBN: 9780841228481
  • Språk: Engelska
  • Antal sidor: 540
  • Utgivningsdatum: 1994-01-01
  • Förlag: American Chemical Society