Micromachined Resonant Devices

Micromachined resonant devices are of great interest for a wide variety of applications, such as inertial sensing, biological/chemical sensing, projection display, biomedical imaging, wireless communication, and instrumentation in micro/nano-technology. "Micromachined Resonant Devices: Design, Modeling, and Simulation" provides a comprehensive and in-depth description of the design, modeling, and simulation of micromachined resonant devices from basic structural components, integrated transducers, to electromechanical system-level models, and including, Optical MEMS, RF MEMS, BioMEMS, and inertial sensing.