bokomslag Run-to-Run Control in Semiconductor Manufacturing
Vetenskap & teknik

Run-to-Run Control in Semiconductor Manufacturing

James Moyne Enrique Del Castillo Arnon M Hurwitz

Inbunden

2409:-

Funktionen begränsas av dina webbläsarinställningar (t.ex. privat läge).

Tillfälligt slut online – klicka på "Bevaka" för att få ett mejl så fort varan går att köpa igen.

  • 366 sidor
  • 2000
Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.
  • Författare: James Moyne, Enrique Del Castillo, Arnon M Hurwitz
  • Format: Inbunden
  • ISBN: 9780849311789
  • Språk: Engelska
  • Antal sidor: 366
  • Utgivningsdatum: 2000-11-01
  • Förlag: CRC Press Inc