Vetenskap & teknik
Run-to-Run Control in Semiconductor Manufacturing
James Moyne • Enrique Del Castillo • Arnon M Hurwitz
Inbunden
2409:-
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Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.
- Format: Inbunden
- ISBN: 9780849311789
- Språk: Engelska
- Antal sidor: 366
- Utgivningsdatum: 2000-11-01
- Förlag: CRC Press Inc