bokomslag Surface Metrology for Micro- and Nanofabrication
Vetenskap & teknik

Surface Metrology for Micro- and Nanofabrication

Wei Gao

Pocket

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  • 448 sidor
  • 2020
Surface Metrology for Micro- and Nanofabrication presents state-of-the-art measurement technologies for surface metrology in fabrication of micro- and nanodevices or components. This includes the newest general-purpose scanning probe microscopes, and both contact and non-contact surface profilers. In addition, the book outlines characterization and calibration techniques, as well as in-situ, on-machine, and in-process measurements for micro- and nanofabrication.


  • Provides materials scientists and engineers with an informed overview of the state-of-the-art in surface metrology
  • Helps readers select and design the optimized surface metrology systems and carry out proper surface metrology practices in the fabrication of micro/nano-devices and components
  • Assesses the best techniques for repairing micro-defects
  • Författare: Wei Gao
  • Format: Pocket/Paperback
  • ISBN: 9780128178508
  • Språk: Engelska
  • Antal sidor: 448
  • Utgivningsdatum: 2020-10-21
  • Förlag: Elsevier